@inproceedings{1a99f0267a0f4e3e99459cc9d69fdd91,
title = "Stiction of surface micromachined structures: a study of the problem and the possible solutions",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "TMH Pham and L Pakula and PJ French and PM Sarro",
note = "CD-ROM; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2003 Through 26-11-2003",
year = "2003",
language = "Undefined/Unknown",
isbn = "90-73461-39-1",
publisher = "Stichting voor de Technische Wetenschappen",
pages = "711--715",
editor = "s.n.",
booktitle = "SAFE 2003 Semiconductor advances for future electronics",
}