Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography

C Olivadoti, HTM Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. 18th MicroMechanics Europe (MME 2006)
Editors s.n.
Place of PublicationGuimares, Portugal
PublisherUniv.of Minho.Ed.
Number of pages4
ISBN (Print)978-972-98603-3-1
Publication statusPublished - 2007

Publication series

PublisherUniv.of Minho.Ed.


  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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