Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography

C Olivadoti, HTM Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proc. 18th MicroMechanics Europe (MME 2006)
Editors	s.n.
Place of Publication	Guimares, Portugal
Publisher	Univ.of Minho.Ed.
Pages	195-198
Number of pages	4
ISBN (Print)	978-972-98603-3-1
Publication status	Published - 2007

Name
Publisher	Univ.of Minho.Ed.

Keywords

@inproceedings{0d595398f2ec41a69780ed611b5a7932,

title = "Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "C Olivadoti and HTM Pham and PM Sarro",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-972-98603-3-1",

publisher = "Univ.of Minho.Ed.",

pages = "195--198",

editor = "s.n.",

booktitle = "Proc. 18th MicroMechanics Europe (MME 2006)",

}

Proc. 18th MicroMechanics Europe (MME 2006). ed. / s.n. Guimares, Portugal : Univ.of Minho.Ed., 2007. p. 195-198.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography

AU - Olivadoti, C

AU - Pham, HTM

AU - Sarro, PM

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-972-98603-3-1

SP - 195

EP - 198

BT - Proc. 18th MicroMechanics Europe (MME 2006)

A2 - s.n., null

PB - Univ.of Minho.Ed.

CY - Guimares, Portugal

ER -