@inproceedings{26da02a9e65c4c2bacce75e8f6da53aa,
title = "Stress and hardness of CrNx films",
keywords = "Conf.proc. > 3 pag",
author = "GCAM Janssen and J-D Kamminga and WG Sloof",
year = "2002",
language = "Undefined/Unknown",
isbn = "1-55899-639-7",
publisher = "Materials Research Society",
pages = "1--6",
editor = "{S Komameni} and {RA Vaia} and {GQ Lu} and {J-I Matsushita} and {JC Parker}",
booktitle = "Nanophase and Nanocomposite Materials",
address = "United States",
note = "MRS fall meeting, Symposium V3.24 ; Conference date: 26-11-2001 Through 30-11-2001",
}