Stress and strain in polycrystalline thin films

    Research output: Contribution to journalArticleScientificpeer-review

    169 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)6654-6664
    Number of pages11
    JournalThin Solid Films
    Volume515
    Publication statusPublished - 2007

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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