Stress and strain in titanium nitride thin films

R Machunze, GCAM Janssen

    Research output: Contribution to journalArticleScientificpeer-review

    54 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)5888-5893
    Number of pages6
    JournalThin Solid Films
    Volume517
    Publication statusPublished - 2009

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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