Stress and strain in titanium nitride thin films

R Machunze, GCAM Janssen

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{9802352b49ca45e7beae88a150135f0d,

title = "Stress and strain in titanium nitride thin films",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "R Machunze and GCAM Janssen",

year = "2009",

language = "Undefined/Unknown",

volume = "517",

pages = "5888--5893",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}