Stress and texture in HIPIMS TiN thin films

R Machunze, AP Ehiasarian, FD Tichelaar, GCAM Janssen

    Research output: Contribution to journalArticleScientificpeer-review

    60 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1561-1565
    Number of pages5
    JournalThin Solid Films
    Volume518
    Publication statusPublished - 2009

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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