Stress and texture in HIPIMS TiN thin films

R Machunze, AP Ehiasarian, FD Tichelaar, GCAM Janssen

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{43cc16ed05504390a133e1d7c2515129,

title = "Stress and texture in HIPIMS TiN thin films",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "R Machunze and AP Ehiasarian and FD Tichelaar and GCAM Janssen",

year = "2009",

language = "Undefined/Unknown",

volume = "518",

pages = "1561--1565",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}