Stress gradients in titanium nitride thin films

R Machunze, GCAM Janssen

    Research output: Contribution to journalArticleScientificpeer-review

    40 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)550-553
    Number of pages4
    JournalSurface and Coatings Technology
    Volume203
    Publication statusPublished - 2008

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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