Stress in AlNiCr films and stacks of films

JP Lokker, JF Jongste, DJ de Boer, GCAM Janssen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the sixth international symposium on ULSI Science and Technology
    Number of pages13
    Publication statusPublished - 1997

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