Stress in AlNiCr films and stacks of films

JP Lokker, JF Jongste, DJ de Boer, GCAM Janssen, S Radelaar

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the sixth international symposium on ULSI Science and Technology
Pages	371-383
Number of pages	13
Publication status	Published - 1997

Cite this

@inproceedings{01326fa0d7904624b25f61b3c52199a0,

title = "Stress in AlNiCr films and stacks of films",

author = "JP Lokker and JF Jongste and {de Boer}, DJ and GCAM Janssen and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

pages = "371--383",

booktitle = "Proceedings of the sixth international symposium on ULSI Science and Technology",

}