Stress in and texture of PVD deposited metal nitride films

R Machunze

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Janssen, G.C.A.M., Supervisor
    Award date9 Jul 2010
    Place of PublicationZutphen
    Publisher
    Print ISBNs978-90-8570-577-2
    Publication statusPublished - 2010

    Keywords

    • Diss. prom. aan TU Delft

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