Stress in hard metal films

GCAM Janssen, JD Kamminga

    Research output: Contribution to journalArticleScientificpeer-review

    73 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)3086-3088
    Number of pages3
    JournalApplied Physics Letters
    Volume85
    Publication statusPublished - 2004

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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