Stress in sputter-deposited Cr films: Infleunce of ar pressure

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)073508-1-073508-4
    JournalJournal of Applied Physics
    Volume97
    Issue number7
    Publication statusPublished - 2005

    Keywords

    • academic journal papers
    • ZX CWTS 1.00 <= JFIS < 3.00

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