Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

F Rabbani, R Escobar Galindo, WM Arnoldbik, S van der Zwaag, A van Veen, H Schut

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1645-1657
Number of pages	13
Journal	Diamond and Related Materials
Volume	13
Publication status	Published - 2004

Keywords

@article{63ed40df3d6341e2a84049f437c8d612,

title = "Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "F Rabbani and {Escobar Galindo}, R and WM Arnoldbik and {van der Zwaag}, S and {van Veen}, A and H Schut",

year = "2004",

language = "Undefined/Unknown",

volume = "13",

pages = "1645--1657",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier",

}

TY - JOUR

T1 - Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

AU - Rabbani, F

AU - Escobar Galindo, R

AU - Arnoldbik, WM

AU - van der Zwaag, S

AU - van Veen, A

AU - Schut, H

PY - 2004

Y1 - 2004

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0925-9635

VL - 13

SP - 1645

EP - 1657

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -