Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

F Rabbani, R Escobar Galindo, WM Arnoldbik, S van der Zwaag, A van Veen, H Schut

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1645-1657
Number of pages13
JournalDiamond and Related Materials
Publication statusPublished - 2004


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