Stress relaxation and creep in free-standing thin aluminium films studied using a bulge tester.

AJ Kalkman, AH Verbruggen, GCAM Janssen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings 5th International Workshop on stress-induced phenomena in metallization.
    EditorsO Kraft, E Arzt, CA Volkert, PS Ho, H Okabayashi
    PublisherAmerican Institute of Physics
    Pages265-270
    Number of pages6
    Publication statusPublished - 1999

    Publication series

    Name
    PublisherAmerican Institute of Physics
    Name
    Volume491

    Cite this