Structural and opto-electronic properties of a-Si:H/a-SiNx:H superlattices, in amorphous and polycrystalline thin-film silicon science and technology

SL Luxembourg, FD Tichelaar, P Kus, M Zeman

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationAmorphous and polycrystalline thin-film silicon science and technology
EditorsA Flewitt, J Hou, S Mijazaki, A Nathan, J Yang
Place of PublicationWarrendale PA, USA
PublisherMRS
Pages1-6
Number of pages6
Publication statusPublished - 2008
EventMaterial research society symposium A, San Francisco, USA - Warrendale PA, USA
Duration: 24 Mar 200828 Mar 2008

Publication series

Name
PublisherMRS
Name
Volume1066

Conference

ConferenceMaterial research society symposium A, San Francisco, USA
Period24/03/0828/03/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this