@inproceedings{9181b3d82d1b4063ae5ba1c7d22b738e,
title = "Structural and opto-electronic properties of a-Si:H/a-SiNx:H superlattices, in amorphous and polycrystalline thin-film silicon science and technology",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "SL Luxembourg and FD Tichelaar and P Kus and M Zeman",
year = "2008",
language = "Undefined/Unknown",
publisher = "MRS",
pages = "1--6",
editor = "A Flewitt and J Hou and S Mijazaki and A Nathan and J Yang",
booktitle = "Amorphous and polycrystalline thin-film silicon science and technology",
note = "Material research society symposium A, San Francisco, USA ; Conference date: 24-03-2008 Through 28-03-2008",
}