Structural characterization of heighly boron doped SiGe/Si heterostructures

JF Woitok, CCG Visser, TLM Scholtes

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)216-220
Number of pages5
JournalMaterials Science and Engineering B: Advanced Functional Solid-state Materials
VolumeB89
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS JFIS < 1.00

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