Structural effects of the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion bombardment

J P Holgado, R Escobar Galindo, A van Veen, H Schut, ThM Hosson, A.R. Gonzales-Elipe

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	333-345
Number of pages	13
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	194
Publication status	Published - 2002

Keywords

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title = "Structural effects of the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion bombardment",

keywords = "ZX CWTS JFIS < 1.00",

author = "Holgado, {J P} and {Escobar Galindo}, R and {van Veen}, A and H Schut and ThM Hosson and A.R. Gonzales-Elipe",

year = "2002",

language = "Undefined/Unknown",

volume = "194",

pages = "333--345",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Structural effects of the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion bombardment

AU - Holgado, J P

AU - Escobar Galindo, R

AU - van Veen, A

AU - Schut, H

AU - Hosson, ThM

AU - Gonzales-Elipe, A.R.

PY - 2002

Y1 - 2002

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0168-583X

VL - 194

SP - 333

EP - 345

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -