Structural effects of the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion bombardment

J P Holgado, R Escobar Galindo, A van Veen, H Schut, ThM Hosson, A.R. Gonzales-Elipe

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)333-345
    Number of pages13
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume194
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS JFIS < 1.00

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