Structure and morphology of aluminium-oxide films formed by thermal oxidation of aluminium

LPH Jeurgens, WG Sloof, FD Tichelaar, EJ Mittemeijer

    Research output: Contribution to journalArticleScientificpeer-review

    188 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)89-101
    Number of pages13
    JournalThin Solid Films
    Volume418
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS JFIS < 1.00

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