Structure and properties of anatase TiO2 thin films made by reactive electron beam evaporation

R van de Krol, APLM Goossens

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	76-83
Number of pages	8
Journal	Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	21
Publication status	Published - 2003

Keywords

@article{dd8b17f65d2d4e6e911da491b164c4ef,

title = "Structure and properties of anatase TiO2 thin films made by reactive electron beam evaporation",

keywords = "professional journal papers, ZX CWTS JFIS < 1.00",

author = "{van de Krol}, R and APLM Goossens",

year = "2003",

language = "Undefined/Unknown",

volume = "21",

pages = "76--83",

journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Structure and properties of anatase TiO2 thin films made by reactive electron beam evaporation

AU - van de Krol, R

AU - Goossens, APLM

PY - 2003

Y1 - 2003

KW - professional journal papers

KW - ZX CWTS JFIS < 1.00

M3 - Article

VL - 21

SP - 76

EP - 83

JO - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

SN - 0734-2101

ER -