Structure and properties of anatase TiO2 thin films made by reactive electron beam evaporation

R van de Krol, APLM Goossens

    Research output: Contribution to journalArticleScientificpeer-review

    28 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)76-83
    Number of pages8
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Volume21
    Publication statusPublished - 2003

    Keywords

    • professional journal papers
    • ZX CWTS JFIS < 1.00

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