Structure of thin polycrystalline silicon films on ceramic substrates

AJMM Zutphen, P Sutta, FD Tichelaar, A von Keitz, M Zeman, JW Metselaar

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)332-340
Number of pages9
JournalJournal of Crystal Growth
Volume223
Issue number1
DOIs
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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