Structure of thin polycrystalline silicon films on ceramic substrates

AJMM Zutphen; P Sutta; FD Tichelaar; A von Keitz; M Zeman; JW Metselaar

doi:Journal of Crystal Growth

Structure of thin polycrystalline silicon films on ceramic substrates

AJMM Zutphen, P Sutta, FD Tichelaar, A von Keitz, M Zeman, JW Metselaar

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

8 Citations (Scopus)

Original language	English
Pages (from-to)	332-340
Number of pages	9
Journal	Journal of Crystal Growth
Volume	223
Issue number	1
DOIs	https://doi.org/Journal of Crystal Growth
Publication status	Published - 2001

Keywords

ZX Int.klas.verslagjaar < 2002

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Journal of Crystal Growth

Cite this

@article{3fada33b8b3242d0aac67a2db16f79e0,

title = "Structure of thin polycrystalline silicon films on ceramic substrates",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "AJMM Zutphen and P Sutta and FD Tichelaar and {von Keitz}, A and M Zeman and JW Metselaar",

year = "2001",

doi = "Journal of Crystal Growth",

language = "English",

volume = "223",

pages = "332--340",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Structure of thin polycrystalline silicon films on ceramic substrates

AU - Zutphen, AJMM

AU - Sutta, P

AU - Tichelaar, FD

AU - von Keitz, A

AU - Zeman, M

AU - Metselaar, JW

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

U2 - Journal of Crystal Growth

DO - Journal of Crystal Growth

M3 - Article

SN - 0022-0248

VL - 223

SP - 332

EP - 340

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1

ER -