Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

F Buja, J Kokorian, AV Sumant, WM van Spengen

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)22-31
JournalDiamond and Related Materials
Volume55
DOIs
Publication statusPublished - 2015

Bibliographical note

Harvest
Available online 25 February 2015

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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