Study of electrochemical etching for 3-D device design

S Izuo, H Ohji, K Tsutsumi, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationTechnical digest
Editors H Adachi
Place of PublicationTokyo
PublisherInstitute of Electrical Engineers of Japan
Pages267-270
Number of pages4
ISBN (Print)4-88686-030-3
Publication statusPublished - 2000

Publication series

Name
PublisherInstitute of Electrical Engineers of Japan

Keywords

  • ZX Int.klas.verslagjaar < 2002

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