@inproceedings{f7573d0c91dd4308af521073fcf54765,
title = "Study of galvanic etching for practical applications",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "XH Xia and CMA Ashruf and PJ French and JJ Kelly",
year = "2000",
language = "Undefined/Unknown",
isbn = "90-73461-24-3",
publisher = "STW Technology Foundation",
pages = "715--717",
editor = "{JP Veen}",
booktitle = "SAFE- ProRISC-SeSens 2000: proceedings",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}