Study of the effect of boron doping on the solid phase crystallisation of hydrogenated amorphous silicon films

JM Westra, RACMM van Swaaij, P Sutta, K Sharma, M Creatore, M Zeman

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Harvest

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@article{681acdca5262437f888b218e33ee8aee,

title = "Study of the effect of boron doping on the solid phase crystallisation of hydrogenated amorphous silicon films",

author = "JM Westra and {van Swaaij}, RACMM and P Sutta and K Sharma and M Creatore and M Zeman",

note = "Harvest",

year = "2014",

doi = "10.1016/j.tsf.2014.07.040",

language = "English",

volume = "568",

pages = "38--43",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Study of the effect of boron doping on the solid phase crystallisation of hydrogenated amorphous silicon films

AU - Westra, JM

AU - van Swaaij, RACMM

AU - Sutta, P

AU - Sharma, K

AU - Creatore, M

AU - Zeman, M

N1 - Harvest

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.07.040

DO - 10.1016/j.tsf.2014.07.040

M3 - Article

SN - 0040-6090

VL - 568

SP - 38

EP - 43

JO - Thin Solid Films

JF - Thin Solid Films

ER -