Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor

Johan Vogel; Stoyan Nihtianov

doi:10.1109/icsens.2016.7808431

Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Abstract

At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.

Original language	English
Title of host publication	2016 IEEE Sensors Proceedings
Editors	E. Fontana, C. Ruiz-Zamarreno
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1-3
Number of pages	3
ISBN (Electronic)	978-1-4799-8287-5
DOIs	https://doi.org/10.1109/icsens.2016.7808431
Publication status	Published - 2016
Event	IEEE Sensors 2016: 15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States Duration: 30 Oct 2016 → 2 Nov 2016 Conference number: 15

Conference

Conference	IEEE Sensors 2016
Country/Territory	United States
City	Orlando, FL
Period	30/10/16 → 2/11/16

Keywords

Archimedean coil
eddy-current sensor
position sensor
self-resonance frequency
modelling

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10.1109/icsens.2016.7808431

Cite this

@inproceedings{88fe388ca7d342f5b1823a75f2e7dea9,

title = "Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor",

abstract = "At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.",

keywords = "Archimedean coil, eddy-current sensor, position sensor, self-resonance frequency, modelling",

author = "Johan Vogel and Stoyan Nihtianov",

year = "2016",

doi = "10.1109/icsens.2016.7808431",

language = "English",

pages = "1--3",

editor = "E. Fontana and C. Ruiz-Zamarreno",

booktitle = "2016 IEEE Sensors Proceedings",

publisher = "IEEE",

address = "United States",

note = "IEEE Sensors 2016 : 15th IEEE Sensors Conference ; Conference date: 30-10-2016 Through 02-11-2016",

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T1 - Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor

AU - Vogel, Johan

AU - Nihtianov, Stoyan

N1 - Conference code: 15

PY - 2016

Y1 - 2016

N2 - At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.

AB - At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.

KW - Archimedean coil

KW - eddy-current sensor

KW - position sensor

KW - self-resonance frequency

KW - modelling

U2 - 10.1109/icsens.2016.7808431

DO - 10.1109/icsens.2016.7808431

M3 - Conference contribution

SP - 1

EP - 3

BT - 2016 IEEE Sensors Proceedings

A2 - Fontana, E.

A2 - Ruiz-Zamarreno, C.

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Sensors 2016

Y2 - 30 October 2016 through 2 November 2016

ER -

Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor

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Keywords

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