Study on 2-level DRIE for 3D MEMS structures

J Wei; T Chu Duc; PM Sarro

Study on 2-level DRIE for 3D MEMS structures

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SAFE 2006 Workshop on Semiconductor Advances for Future Electronics and Sensors
Editors	s.n.
Place of Publication	Veldhoven
Publisher	s.l.
Pages	494-497
Number of pages	4
ISBN (Print)	90-73461-44-8
Publication status	Published - 2006
Event	9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands - Utrecht Duration: 23 Nov 2006 → 24 Nov 2006

Publication series

Name
Publisher	s.l.

Conference

Conference	9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands
Period	23/11/06 → 24/11/06

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{11e9999eea3c4b0cae6ce1bdc2d0bd94,

title = "Study on 2-level DRIE for 3D MEMS structures",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "J Wei and {Chu Duc}, T and PM Sarro",

year = "2006",

language = "Undefined/Unknown",

isbn = "90-73461-44-8",

publisher = "s.l.",

pages = "494--497",

editor = "s.n.",

booktitle = "Proceedings of SAFE 2006 Workshop on Semiconductor Advances for Future Electronics and Sensors",

note = "9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands ; Conference date: 23-11-2006 Through 24-11-2006",

}

TY - GEN

T1 - Study on 2-level DRIE for 3D MEMS structures

AU - Wei, J

AU - Chu Duc, T

AU - Sarro, PM

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-44-8

SP - 494

EP - 497

BT - Proceedings of SAFE 2006 Workshop on Semiconductor Advances for Future Electronics and Sensors

A2 - s.n., null

PB - s.l.

CY - Veldhoven

T2 - 9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands

Y2 - 23 November 2006 through 24 November 2006

ER -