Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

Hao Hong, Jiangtao Wei, Xin Lei, Haiyun Chen, Pasqualina M. Sarro, Guoqi Zhang, Zewen Liu^*

^*Corresponding author for this work

Electronic Components, Technology and Materials

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2023
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method (Microsystems & Nanoengineering, (2023), 9, 1, (63), 10.1038/s41378-023-00532-0)
Hong, H., Wei, J., Lei, X., Chen, H., Sarro, P. M., Zhang, G. & Liu, Z., 2023, In: Microsystems and Nanoengineering. 9, 1, 1 p., 98.
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