SU-8 structures for integrated high-speed screening

BL Gray, VP Iordanov, PM Sarro, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationMicro total analysis systems 2002; proceedings of the µTAS 2002 symposium
EditorsY Baba, S Shoji, A van den Berg
Place of PublicationDordrecht
PublisherKluwer Academic Publishes
Pages464-466
Number of pages3
ISBN (Print)1-4020-1009-5
Publication statusPublished - 2002
EventµTAS 2002 symposium held in Nara, Japan - Dordrecht
Duration: 3 Nov 20027 Nov 2002

Publication series

Name
PublisherKluwer Academic Publishes
Name
Volume1

Conference

ConferenceµTAS 2002 symposium held in Nara, Japan
Period3/11/027/11/02

Keywords

  • Elektrotechniek
  • Techniek
  • Geen BTA classificatie

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