Sub-10 nm resolution electron beam lithography in ultrathin HSQ resist layers

AE Grigorescu

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    • Kruit, P., Supervisor
    • Hagen, C.W., Advisor
    Award date4 Nov 2009
    Print ISBNs978-90-9024791-5
    Publication statusPublished - 2009


    • Diss. prom. aan TU Delft

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