Sub-100 nm silicon-nitride hard-mask for high aspect-ratio silicon fins

V Jovanovi¿, S Milosavljevi¿, LK Nanver, T Suligoj, P Biljanovi¿

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Title of host publication	MIPRO 2007 International Conference
Editors	s.n.
Place of Publication	s.l.
Publisher	s.n.
Pages	1-4
Number of pages	4
Publication status	Published - 2007

Name
Publisher	s.n.

Keywords

@inproceedings{3008c8fc16694585904a48106312df2f,

title = "Sub-100 nm silicon-nitride hard-mask for high aspect-ratio silicon fins",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "V Jovanovi¿ and S Milosavljevi¿ and LK Nanver and T Suligoj and P Biljanovi¿",

year = "2007",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "1--4",

editor = "s.n.",

booktitle = "MIPRO 2007 International Conference",

}

TY - GEN

T1 - Sub-100 nm silicon-nitride hard-mask for high aspect-ratio silicon fins

AU - Jovanovi¿, V

AU - Milosavljevi¿, S

AU - Nanver, LK

AU - Suligoj, T

AU - Biljanovi¿, P

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - MIPRO 2007 International Conference

A2 - s.n., null

PB - s.n.

CY - s.l.

ER -