Sub-Angstrom resolution position feedback and control in Scanning Probe Microscopes

KR Koops, R Banning, PMLO Scholte, WC Heerens, JMTA Adriaens, WL de Koning

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the 2nd Seminar on Quantitative Microscopy: Geometrical measurements in the micro- and nanometre range with far and near field methods
EditorsK Hasche, W Mirande, G Wilkening
Number of pages8
Publication statusPublished - 1997

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