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Sub-nanometer accurate fiber-fed heterodyne interferometer
AJH Meskers
Mechatronic Systems Design
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Dive into the research topics of 'Sub-nanometer accurate fiber-fed heterodyne interferometer'. Together they form a unique fingerprint.
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INIS
resolution
100%
range
100%
accuracy
100%
fibers
100%
interferometers
100%
positioning
50%
production
50%
precision
50%
demand
50%
acceleration
50%
universities
50%
semiconductor materials
50%
extreme ultraviolet radiation
50%
velocity
50%
industry
50%
beams
50%
Earth and Planetary Sciences
Interferometer
100%
Rangefinding
100%
Accuracy
100%
Fibre
100%
Lithography
50%
University
50%
Order
50%
Reticle
50%
Input
50%
Micrometer
50%
Semiconductor Industry
50%
Engineering
Nanometre
100%
Fiber
100%
Velocity
50%
Production Process
50%
Range Measurement
50%
High Precision
50%
Decimeter
50%
Measurement Range
50%
Extreme-Ultraviolet Lithography
50%
Stages
50%
Semiconductor
50%
Medicine and Dentistry
Measurement
100%
Position
33%
Apoplexy
33%