Subnanometer stability of nano-stage supports

H van der Wulp, PV Pistecky, WC Heerens

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	566-573
Number of pages	8
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	15
Issue number	3
Publication status	Published - 1997

Cite this

@article{1db4cf91976247389fb75a4a8661803e,

title = "Subnanometer stability of nano-stage supports",

author = "{van der Wulp}, H and PV Pistecky and WC Heerens",

year = "1997",

language = "Undefined/Unknown",

volume = "15",

pages = "566--573",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Subnanometer stability of nano-stage supports

AU - van der Wulp, H

AU - Pistecky, PV

AU - Heerens, WC

PY - 1997

Y1 - 1997

M3 - Article

SN - 1071-1023

VL - 15

SP - 566

EP - 573

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 3

ER -