@inproceedings{d105007182f24ced9b231c1779561d5c,
title = "Substrate options and add-on process modules for monolithic RF silicon technology",
keywords = "Conf.proc. > 3 pag, ZX Int.klas.verslagjaar < 2002",
author = "JN Burghartz and M Bartek and B Rejaei and PM Sarro and A Poliakov and NP Pham and E Boellaard and TK Ng",
year = "2002",
language = "Undefined/Unknown",
isbn = "0-7803-7561-0",
publisher = "IEEE",
pages = "17--23",
booktitle = "IEEE BCTM 2002 IEEE Bipolar Circuits Technology Meeting",
address = "United States",
note = "IEEE BCTM 2002, Monterey, CA. USA; ; Conference date: 29-09-2002 Through 01-10-2002",
}