Substrate options and add-on process modules for monolithic RF silicon technology

JN Burghartz, M Bartek, B Rejaei, PM Sarro, A Poliakov, NP Pham, E Boellaard, TK Ng

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

18 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationIEEE BCTM 2002 IEEE Bipolar Circuits Technology Meeting
Place of PublicationPiscataway, NJ. USA
PublisherIEEE Society
Pages17-23
Number of pages7
ISBN (Print)0-7803-7561-0
Publication statusPublished - 2002
EventIEEE BCTM 2002, Monterey, CA. USA; - Piscataway, NJ. USA
Duration: 29 Sep 20021 Oct 2002

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE BCTM 2002, Monterey, CA. USA;
Period29/09/021/10/02

Keywords

  • Conf.proc. > 3 pag
  • ZX Int.klas.verslagjaar < 2002

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