Substrate options and add-on process modules for monolithic RF silicon technology

JN Burghartz; M Bartek; B Rejaei; PM Sarro; A Poliakov; NP Pham; E Boellaard; TK Ng

Substrate options and add-on process modules for monolithic RF silicon technology

JN Burghartz, M Bartek, B Rejaei, PM Sarro, A Poliakov, NP Pham, E Boellaard, TK Ng

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

18 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	IEEE BCTM 2002 IEEE Bipolar Circuits Technology Meeting
Place of Publication	Piscataway, NJ. USA
Publisher	IEEE Society
Pages	17-23
Number of pages	7
ISBN (Print)	0-7803-7561-0
Publication status	Published - 2002
Event	IEEE BCTM 2002, Monterey, CA. USA; - Piscataway, NJ. USA Duration: 29 Sept 2002 → 1 Oct 2002

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE BCTM 2002, Monterey, CA. USA;
Period	29/09/02 → 1/10/02

Keywords

Conf.proc. > 3 pag
ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{d105007182f24ced9b231c1779561d5c,

title = "Substrate options and add-on process modules for monolithic RF silicon technology",

keywords = "Conf.proc. > 3 pag, ZX Int.klas.verslagjaar < 2002",

author = "JN Burghartz and M Bartek and B Rejaei and PM Sarro and A Poliakov and NP Pham and E Boellaard and TK Ng",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-7803-7561-0",

publisher = "IEEE Society",

pages = "17--23",

booktitle = "IEEE BCTM 2002 IEEE Bipolar Circuits Technology Meeting",

note = "IEEE BCTM 2002, Monterey, CA. USA; ; Conference date: 29-09-2002 Through 01-10-2002",

}

TY - GEN

T1 - Substrate options and add-on process modules for monolithic RF silicon technology

AU - Burghartz, JN

AU - Bartek, M

AU - Rejaei, B

AU - Sarro, PM

AU - Poliakov, A

AU - Pham, NP

AU - Boellaard, E

AU - Ng, TK

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-7561-0

SP - 17

EP - 23

BT - IEEE BCTM 2002 IEEE Bipolar Circuits Technology Meeting

PB - IEEE Society

CY - Piscataway, NJ. USA

T2 - IEEE BCTM 2002, Monterey, CA. USA;

Y2 - 29 September 2002 through 1 October 2002

ER -