Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition

S.G. Rosenberg, K Landheer, CW Hagen, D.H. Fairbrother

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-10
Number of pages	10
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	30
Issue number	5
Publication status	Published - 2012

artnr 051805

Cite this

@article{4b3cb641b3124488922004d1c69e95d8,

title = "Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition",

author = "S.G. Rosenberg and K Landheer and CW Hagen and D.H. Fairbrother",

note = "artnr 051805",

year = "2012",

language = "Undefined/Unknown",

volume = "30",

pages = "1--10",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "5",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition

AU - Rosenberg, S.G.

AU - Landheer, K

AU - Hagen, CW

AU - Fairbrother, D.H.

N1 - artnr 051805

PY - 2012

Y1 - 2012

M3 - Article

SN - 1071-1023

VL - 30

SP - 1

EP - 10

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 5

ER -