Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition

S.G. Rosenberg, K Landheer, CW Hagen, D.H. Fairbrother

    Research output: Contribution to journalArticleScientificpeer-review

    24 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1-10
    Number of pages10
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Issue number5
    Publication statusPublished - 2012

    Bibliographical note

    artnr 051805

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