Suppression of corner effects in wide channel triple gate bulk finfets

M Poljak, V Jovanovic, T Suligoj

Research output: Contribution to journal › Article › Scientific › peer-review

14 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	192-199
Number of pages	8
Journal	Microelectronic Engineering
Volume	87
Issue number	2
DOIs	https://doi.org/doi:10.1016/j.mee.2009.07.013
Publication status	Published - 2010

Keywords

@article{24d3cb91e3c6406da8f3288873b58b78,

title = "Suppression of corner effects in wide channel triple gate bulk finfets",

keywords = "CWTS JFIS < 0.75",

author = "M Poljak and V Jovanovic and T Suligoj",

year = "2010",

doi = "doi:10.1016/j.mee.2009.07.013",

language = "Undefined/Unknown",

volume = "87",

pages = "192--199",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Suppression of corner effects in wide channel triple gate bulk finfets

AU - Poljak, M

AU - Jovanovic, V

AU - Suligoj, T

PY - 2010

Y1 - 2010

KW - CWTS JFIS < 0.75

U2 - doi:10.1016/j.mee.2009.07.013

DO - doi:10.1016/j.mee.2009.07.013

M3 - Article

SN - 0167-9317

VL - 87

SP - 192

EP - 199

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 2

ER -