Surface-charge-layer sheet-resistance measurements for evaluating interface RF losses on high-resistivity-silicon substrates

SB Evseev, LK Nanver, S Milosaviljevic

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)3542-3550
Number of pages9
JournalIEEE Transactions on Microwave Theory and Techniques
Volume60
Issue number11
DOIs
Publication statusPublished - 2012

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