@inproceedings{7c0be5891437441486be5c638f49b00a,
title = "Surface micromached gas sensor using thermopiles for carbon dioxide detection",
keywords = "Conf.proc. > 3 pag",
author = "S Chen and HW Wu and {de Graaf}, G and RF Wolffenbuttel",
year = "2010",
language = "English",
publisher = "MME",
pages = "216--219",
editor = "{van Honschoten}, J and H Verputten and H Groenland",
booktitle = "21st Micromechanics and Micro systems Europe 2010Surface micromached gas sensor using thermopiles for carbon dioxide detection",
note = " MME 2010 : Micromechanics and Microsystems Europe Workshop ; Conference date: 26-09-2010 Through 29-09-2010",
}