Surface micromachined CMOS compatible vertical accelerometer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationThe sense of contact 6: where industry meets science workshop sensortechnology
Place of PublicationS.l.
Publishers.n.
Pages1-4
Number of pages4
ISBN (Print)954-438-386-7
Publication statusPublished - 2004
EventThe sense of contact 6: where industry meets science workshop sensortechnology, Wageningen, The Netherlands - S.l.
Duration: 23 Mar 200423 Mar 2004

Publication series

Name
PublisherS.n.

Conference

ConferenceThe sense of contact 6: where industry meets science workshop sensortechnology, Wageningen, The Netherlands
Period23/03/0423/03/04

Keywords

  • Conf.proc. > 3 pag

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