Surface micromachined CMOS compatible vertical accelerometer

L Pakula; H Yang; PJ French

Surface micromachined CMOS compatible vertical accelerometer

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	The sense of contact 6: where industry meets science workshop sensortechnology
Place of Publication	S.l.
Publisher	s.n.
Pages	1-4
Number of pages	4
ISBN (Print)	954-438-386-7
Publication status	Published - 2004
Event	The sense of contact 6: where industry meets science workshop sensortechnology, Wageningen, The Netherlands - S.l. Duration: 23 Mar 2004 → 23 Mar 2004

Publication series

Name
Publisher	S.n.

Conference

Conference	The sense of contact 6: where industry meets science workshop sensortechnology, Wageningen, The Netherlands
Period	23/03/04 → 23/03/04

Bibliographical note

ed. is niet bekend

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{6632faa230ce49c7a21092e1edd324b2,

title = "Surface micromachined CMOS compatible vertical accelerometer",

keywords = "Conf.proc. > 3 pag",

author = "L Pakula and H Yang and PJ French",

note = "ed. is niet bekend; The sense of contact 6: where industry meets science workshop sensortechnology, Wageningen, The Netherlands ; Conference date: 23-03-2004 Through 23-03-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "954-438-386-7",

publisher = "s.n.",

pages = "1--4",

booktitle = "The sense of contact 6: where industry meets science workshop sensortechnology",

}

TY - GEN

T1 - Surface micromachined CMOS compatible vertical accelerometer

AU - Pakula, L

AU - Yang, H

AU - French, PJ

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 954-438-386-7

SP - 1

EP - 4

BT - The sense of contact 6: where industry meets science workshop sensortechnology

PB - s.n.

CY - S.l.

T2 - The sense of contact 6: where industry meets science workshop sensortechnology, Wageningen, The Netherlands

Y2 - 23 March 2004 through 23 March 2004

ER -