Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

A Burtsev, H Schut, LK Nanver, A van Veen, J Slabbekoorn, TLM Scholtes

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	109-113
Number of pages	5
Journal	Materials Science and Engineering B: Advanced Functional Solid-state Materials
Volume	114-115
Publication status	Published - 2004

Keywords

@article{0a72b09a09b54175ba67d036cc07e217,

title = "Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes",

keywords = "ZX CWTS JFIS < 1.00",

author = "A Burtsev and H Schut and LK Nanver and {van Veen}, A and J Slabbekoorn and TLM Scholtes",

year = "2004",

language = "Undefined/Unknown",

volume = "114-115",

pages = "109--113",

journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",

issn = "0921-5107",

publisher = "Elsevier",

}

TY - JOUR

T1 - Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

AU - Burtsev, A

AU - Schut, H

AU - Nanver, LK

AU - van Veen, A

AU - Slabbekoorn, J

AU - Scholtes, TLM

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0921-5107

VL - 114-115

SP - 109

EP - 113

JO - Materials Science and Engineering B: Advanced Functional Solid-state Materials

JF - Materials Science and Engineering B: Advanced Functional Solid-state Materials

ER -