Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

A Bourtsev, H Schut, LK Nanver, A van Veen, J Slabbekoorn, TLM Scholtes

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)109-113
Number of pages5
JournalMaterials Science and Engineering B: Advanced Functional Solid-state Materials
Publication statusPublished - 2004


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