Surface morphology of c-plane sapphire (alpha-alumina) prouced by high termperature anneal

F Cuccureddu; S Murphy; IV Shvets; M Porcu; HW Zandbergen; NS Sidorov; SI Bozhko

doi:10.1016/j.susc.2010.04.017

Surface morphology of c-plane sapphire (alpha-alumina) prouced by high termperature anneal

F Cuccureddu, S Murphy, IV Shvets, M Porcu, HW Zandbergen, NS Sidorov, SI Bozhko

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Abstract

A comparative study of the morphological surface evolution of c-plane (0001) alpha-Al2O3 upon annealing was investigated for non-miscut (i.e. substrates with 0 degrees nominal miscut) and vicinal substrates. The samples were annealed in air at 1100 degrees C for different durations of time. Although non-miscut samples do not show any step bunching at this temperature, miscut substrates show a regular and ordered stepped morphology with clearly defined terraces as revealed by Atomic Force Microscopy (AFM) and Transmission Electron Microscopy (TEM) image analysis. The surface morphology presents a number of coalescence points, i.e. locations where two steps merge and form a multiple step. Close to the coalescence points, parallel steps change direction to different low index direction.

Original language	English
Pages (from-to)	1294-12999
Number of pages	11706
Journal	Surface Science
Volume	604
Issue number	15-16
DOIs	https://doi.org/10.1016/j.susc.2010.04.017
Publication status	Published - 2010

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academic journal papers
CWTS JFIS < 0.75

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10.1016/j.susc.2010.04.017

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title = "Surface morphology of c-plane sapphire (alpha-alumina) prouced by high termperature anneal",

abstract = "A comparative study of the morphological surface evolution of c-plane (0001) alpha-Al2O3 upon annealing was investigated for non-miscut (i.e. substrates with 0 degrees nominal miscut) and vicinal substrates. The samples were annealed in air at 1100 degrees C for different durations of time. Although non-miscut samples do not show any step bunching at this temperature, miscut substrates show a regular and ordered stepped morphology with clearly defined terraces as revealed by Atomic Force Microscopy (AFM) and Transmission Electron Microscopy (TEM) image analysis. The surface morphology presents a number of coalescence points, i.e. locations where two steps merge and form a multiple step. Close to the coalescence points, parallel steps change direction to different low index direction.",

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author = "F Cuccureddu and S Murphy and IV Shvets and M Porcu and HW Zandbergen and NS Sidorov and SI Bozhko",

year = "2010",

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language = "English",

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T1 - Surface morphology of c-plane sapphire (alpha-alumina) prouced by high termperature anneal

AU - Cuccureddu, F

AU - Murphy, S

AU - Shvets, IV

AU - Porcu, M

AU - Zandbergen, HW

AU - Sidorov, NS

AU - Bozhko, SI

PY - 2010

Y1 - 2010

N2 - A comparative study of the morphological surface evolution of c-plane (0001) alpha-Al2O3 upon annealing was investigated for non-miscut (i.e. substrates with 0 degrees nominal miscut) and vicinal substrates. The samples were annealed in air at 1100 degrees C for different durations of time. Although non-miscut samples do not show any step bunching at this temperature, miscut substrates show a regular and ordered stepped morphology with clearly defined terraces as revealed by Atomic Force Microscopy (AFM) and Transmission Electron Microscopy (TEM) image analysis. The surface morphology presents a number of coalescence points, i.e. locations where two steps merge and form a multiple step. Close to the coalescence points, parallel steps change direction to different low index direction.

AB - A comparative study of the morphological surface evolution of c-plane (0001) alpha-Al2O3 upon annealing was investigated for non-miscut (i.e. substrates with 0 degrees nominal miscut) and vicinal substrates. The samples were annealed in air at 1100 degrees C for different durations of time. Although non-miscut samples do not show any step bunching at this temperature, miscut substrates show a regular and ordered stepped morphology with clearly defined terraces as revealed by Atomic Force Microscopy (AFM) and Transmission Electron Microscopy (TEM) image analysis. The surface morphology presents a number of coalescence points, i.e. locations where two steps merge and form a multiple step. Close to the coalescence points, parallel steps change direction to different low index direction.

KW - academic journal papers

KW - CWTS JFIS < 0.75

U2 - 10.1016/j.susc.2010.04.017

DO - 10.1016/j.susc.2010.04.017

M3 - Article

SN - 0039-6028

VL - 604

SP - 1294

EP - 12999

JO - Surface Science

JF - Surface Science

IS - 15-16

ER -

Surface morphology of c-plane sapphire (alpha-alumina) prouced by high termperature anneal

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