Surface-passivated high-resistivity silicon as a true microwave substrate

M Spirito, FM De Paola, LK Nanver, E Valletta, B Rong, B Rejaei, LCN de Vreede, JN Burghartz

Research output: Contribution to journalArticleScientificpeer-review

41 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2340-2347
Number of pages8
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number7
Publication statusPublished - 2005

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