Surface roughness analysis of ETP-CVD a-Si:H thin films

MA Wank, RACMM van Swaaij, MCM van de Sanden

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationThe annual workshop on semiconductor advances for future electronics and sensors
Editors s.n.
Place of PublicationVeldhoven, the Nederlands
Pages516-519
Number of pages4
Publication statusPublished - 2008
EventSAFE 2008, Veldhoven, the Netherlands - Veldhoven, the Nederlands
Duration: 27 Nov 200828 Nov 2008

Conference

ConferenceSAFE 2008, Veldhoven, the Netherlands
Period27/11/0828/11/08

Keywords

  • conference contrib. refereed
  • Vakpubl., Overig wet. > 3 pag

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