@inproceedings{17202b72c5e64f94818a0a72bd7cff1c,
title = "Surface roughness of contact windows for shallow junction formation",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "V Gonda and A Burtsev and TLM Scholtes and LK Nanver",
note = "ed. is niet bekend; null ; Conference date: 25-11-2004 Through 26-11-2004",
year = "2004",
language = "Undefined/Unknown",
isbn = "90-73461-43-X",
publisher = "STW Technology Foundation",
pages = "639--642",
booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",
}