Surface roughness of contact windows for shallow junction formation

V Gonda, A Burtsev, TLM Scholtes, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	639-642
Number of pages	4
ISBN (Print)	90-73461-43-X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, The Netherland - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Name
Publisher	STW Technology Foundation

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherland
Period	25/11/04 → 26/11/04

Keywords

@inproceedings{17202b72c5e64f94818a0a72bd7cff1c,

title = "Surface roughness of contact windows for shallow junction formation",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "V Gonda and A Burtsev and TLM Scholtes and LK Nanver",

note = "ed. is niet bekend; null ; Conference date: 25-11-2004 Through 26-11-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43-X",

publisher = "STW Technology Foundation",

pages = "639--642",

booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",

}

SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics. Utrecht : STW Technology Foundation, 2004. p. 639-642.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Surface roughness of contact windows for shallow junction formation

AU - Gonda, V

AU - Burtsev, A

AU - Scholtes, TLM

AU - Nanver, LK

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43-X

SP - 639

EP - 642

BT - SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics

PB - STW Technology Foundation

CY - Utrecht

Y2 - 25 November 2004 through 26 November 2004

ER -