Abstract
In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molecular adsorption, there exists a surface stress and a surface elasticity imbalance between top and bottom surface of the cantilever. The surface elasticity imbalance creates an extra bending-extensional coupling which has not been taken into account previously. This leads to a modified extensional stiffness, bending stiffness and bending-extensional coupling stiffness. Due to the surface stress imbalance, an extended Stoney's formula for self-bending of ultrathin cantilevers is derived.
Original language | Undefined/Unknown |
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Pages (from-to) | 1-3 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 94 |
Issue number | 231908 |
Publication status | Published - 2009 |
Keywords
- academic journal papers
- CWTS 0.75 <= JFIS < 2.00