Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications

Research output: Contribution to journalArticleScientific

28 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)45-53
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume8
Issue number2
Publication statusPublished - 1998

Keywords

  • ZX Int.klas.verslagjaar < 2002

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