Suspended graphene beams with tunable gap for squeeze-film pressure sensing

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Abstract

We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.
Original languageEnglish
Title of host publicationTransducers 2017
Subtitle of host publication19th International Conference on Solid-State Sensors, Actuators, and Microsystems
EditorsW. Fang, C.P. Hung, S. Shoji
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages770-773
ISBN (Electronic)978-1-5386-2731-0
ISBN (Print)978-1-5386-2732-7
DOIs
Publication statusPublished - 2017
EventTransducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan
Duration: 18 Jun 201722 Jun 2017

Conference

ConferenceTransducers 2017
Abbreviated titleTransducers'17
CountryTaiwan
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Graphene
  • suspended beam
  • sonator
  • squeeze-film effect
  • pressure sensor

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